The Keithley 7072-HV 8x12 High-Voltage Semiconductor Matrix Card is designed to switch low-level, high-voltage, and high-impedance signals for semiconductor parametric tests on wafers and devices. This unique design provides two signal paths capable of switching 1300V with less than 1pA of offset current. The two C-V paths may be used for measurement of capacitance voltage characteristics from DC to 1 MHz or for switching low currents with a common ground. Four additional high quality signal paths with less than 20pA offset current provide for signal switching to 200V.

Connections are 3-lug triax with the outer shell connected to chassis for safety and noise shielding. The center conductor is fully surrounded by the inner conducting shield to provide fully guarded measurements with higher isolation and improved measurement speed and accuracy.

7072-HV Applications

The 7072-HV is typically used with 2410 SourceMeter SMU Instruments, Series 2600B SourceMeter SMU Instruments, and 4200-SCS Parameter Analyzers to address a wide variety of semiconductor device and material characterization needs.

The high voltage signals encountered in breakdown measurements or oxide integrity testing can be easily switched with this matrix card. Signals connected to the High V, Low I paths are automatically isolated from the rest of the card.

For applications requiring connections to a large number of devices or test points, the 7072-HV matrix can be expanded with additional cards. The high voltage and C-V rows can be extended to other cards with coaxial jumpers. The other four high-quality signal paths connect directly to the 707A or 708A backplane for expansion.